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2. Pattern inspection of EUV masks using DUV light;Liang,2002
3. Actinic mask imaging: Recent results and future directions from the sharp euv microscope;Goldberg,2014
4. Lensless EUV mask inspection for anamorphic patterns;Mochi,2021
5. Refinement strategies for optimal inclusion of prior information in ptychography;Ansuinelli,2020