Silicon photonics and challenges for fabrication
Author:
Affiliation:
1. GLOBALFOUNDRIES Inc. (United States)
2. IBM Thomas J. Watson Research Ctr. (United States)
3. GLOBALFOUNDRIES Engineering (India)
Publisher
SPIE
Cited by 9 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Strategic Insights into Integrated Photonics: Core Concepts, Practical Deployments, and Future Outlook;Applied Sciences;2024-07-22
2. FDTD analysis of direct optical integration between SiNx waveguides and Ge/SiGe multiple quantum wells on graded buffer for low-voltage optical modulators around the O-band wavelength;Results in Optics;2024-02
3. FDTD Investigation of Efficient and Robust Integration Between Si3N4 and Ge-Rich GeSi for Waveguide-Integrated Electro-Absorption Optical Modulators;IEEE Access;2023
4. An FDTD Investigation of Compact and Low-Voltage Waveguide-Integrated Plasmonic Ge/SiGe Multiple Quantum Wells Photodetectors;IEEE Photonics Journal;2022-10
5. Metamaterial-Engineered Silicon Beam Splitter Fabricated with Deep UV Immersion Lithography;Nanomaterials;2021-11-03
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