Impact of UV-ozone (UVO) treatment on optical and electrical properties of RF sputtered Ga2O3 thin films for opto-electronic application-Reference-Cited by-同舟云学术

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Impact of UV-ozone (UVO) treatment on optical and electrical properties of RF sputtered Ga2O3 thin films for opto-electronic application

Published:2023-10-03 Issue: Volume: Page:
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Container-title:Nanoengineering: Fabrication, Properties, Optics, Thin Films, and Devices XX
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Author:

Mishra Madhuri,Saha Rajib,Bhowmick Sangita,Chakrabarti Subhananda

Publisher

SPIE

Reference15 articles.

1. Impact of deposition temperature on crystalline quality, oxygen vacancy, defect modulations and hetero-interfacial properties of RF sputtered deposited Ga₂O₃ thin films on Si substrate

2. A review of Ga2O3materials, processing, and devices

3. Properties and perspectives of ultrawide bandgap Ga2O3 in optoelectronic applications;Ping,2021

4. A review of the most recent progresses of state-of-art gallium oxide power devices

5. Recent advances in the growth of gallium oxide thin films employing various growth techniques—a review

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