Optimizing hybrid metrology through a consistent multi-tool parameter set and uncertainty model-Reference-Cited by-同舟云学术

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Optimizing hybrid metrology through a consistent multi-tool parameter set and uncertainty model

Published:2014-04-14 Issue: Volume: Page:
ISSN:0277-786X
Container-title:Metrology, Inspection, and Process Control for Microlithography XXVIII
language:
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Author:

Silver R. M.,Barnes B. M.,Zhang N. F.,Zhou H.,Vladár A.,Villarrubia J.,Kline J.,Sunday D.,Vaid A.

Publisher

SPIE

Reference11 articles.

1. Improving optical measurement accuracy using multi-technique nested uncertainties;Silver,2009

2. Hybrid reference metrology exploiting patterning simulation;Rana,2010

3. 3D-AFM Enhancement for CD Metrology Dedicated to Lithography Sub-28 nm Node Requirements;Foucher,2010

4. Nested Uncertainties and Hybrid Metrology to Improve Measurement Accuracy;Silver,2011

5. A Bayesian Statistical Model for Hybrid Metrology to Improve Measurement Accuracy;Silver,2011

Cited by 8 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Efficient Bayesian inversion for shape reconstruction of lithography masks;Journal of Micro/Nanolithography, MEMS, and MOEMS;2020-05-05

2. Nondestructive shape process monitoring of three-dimensional, high-aspect-ratio targets using through-focus scanning optical microscopy;Measurement Science and Technology;2018-11-05

3. Combining model-based measurement results of critical dimensions from multiple tools;Measurement Science and Technology;2017-04-07

4. Metrology of nanoscale grating structures by UV scatterometry;Optics Express;2017-01-31

5. Parameter optimization for through-focus scanning optical microscopy;Optics Express;2016-06-23

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