Digital holographic microscopy for the characterization of microelectromechanical systems-Reference-Cited by-同舟云学术

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Digital holographic microscopy for the characterization of microelectromechanical systems

Published:2016-04-26 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
language:
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Author:

Pagliarulo V.,Miccio L.,Ferraro P.

Publisher

SPIE

Reference26 articles.

1. The MEMS Handbook;Gad-el-Hak,2001

2. Sensors, MEMS, and Electro-Optical Systems;Du Plessis,2014

3. Fundamentals of Microfabrication;Madou,1998

4. Recent developments in MEMS sensors: a review of applications, markets and technologies

5. Smart Sensors and MEMS: Intelligent Devices and Microsystems for Industrial Applications;Nihtianov,2014

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. pyDHM: A Python library for applications in digital holographic microscopy;PLOS ONE;2022-10-10

2. Single-Shot 3D Topography of Transmissive and Reflective Samples with a Dual-Mode Telecentric-Based Digital Holographic Microscope;Sensors;2022-05-17

3. Out-of-plane wave propagation in two-dimensional micro-lattices;Physica Scripta;2021-05-21

4. Thermal Characterization of Dynamic Silicon Cantilever Array Sensors by Digital Holographic Microscopy;Sensors;2017-05-23

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