Thermal Characterization of Dynamic Silicon Cantilever Array Sensors by Digital Holographic Microscopy
Author:
Funder
DFG
Publisher
MDPI AG
Subject
Electrical and Electronic Engineering,Biochemistry,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry
Link
http://www.mdpi.com/1424-8220/17/6/1191/pdf
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