A Surface Micromachining: HNA Etchant for Stiction-free Release of Micro/Nanomechanical Structures-Reference-Cited by-同舟云学术

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A Surface Micromachining: HNA Etchant for Stiction-free Release of Micro/Nanomechanical Structures

Published:2021 Issue: Volume:42 Page:1218-1223
ISSN:2214-7853
Container-title:Materials Today: Proceedings
language:en
Short-container-title:Materials Today: Proceedings

Author:

Deepu Bagur R.,Venkatachalam Ponnusubramaniyam,Mirji Fakirappa N.,Littin Varghese,Naveen Hebbal,Savitha Purakkat,Basavaraju Yeriyur B.

Funder

Indian Institute of Science

Publisher

Elsevier BV

Subject

General Medicine

Reference13 articles.

1. Silicon waveguide cantilever displacement sensor for potential application for on-chip high speed AFM

2. Micromechanical cantilever-based biosensors

3. Thermal Characterization of Dynamic Silicon Cantilever Array Sensors by Digital Holographic Microscopy

4. Size-dependent effective Young’s modulus of silicon nitride cantilevers

5. Investigating the Mechanical Effects of Adsorption of Ca2+ Ions on a Silicon Nitride Microcantilever Surface

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A Proton Battery Stack Real-Time Monitor with a Flexible Six-in-One Microsensor;Membranes;2022-08-13

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