Nanometrology for evaluating rare sites for molecular homogeneity-Reference-Cited by-同舟云学术

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Nanometrology for evaluating rare sites for molecular homogeneity

Published:2022-11-28 Issue:04 Volume:21 Page:
ISSN:2708-8340
Container-title:Journal of Micro/Nanopatterning, Materials, and Metrology
language:
Short-container-title:J. Micro/Nanopattern. Mats. Metro.

Author:

Eller Michael J.¹,Cruz Jander¹,Verkhoturov Stanislav V.²,Robinson Michael A.³,Blackwell James M.⁴,Schweikert Emile A.²

Affiliation:

1. California State University, Northridge, Department of Chemistry and Biochemistry, Northridge, California, United States

2. Texas A and M University, Department of Chemistry, College Station, Texas, United States

3. Intel Corporation, Corporate Quality Network, Hillsboro, Oregon, United States

4. Intel Corporation, Components Research, Hillsboro, Oregon, United States

Publisher

SPIE-Intl Soc Optical Eng

Subject

General Arts and Humanities

Reference25 articles.

1. Metal-organic framework superhydrophobic coating on Kevlar fabric with efficient drag reduction and wear resistance

2. Thermal Stability of Core–Shell Nanoparticles: A Combined in Situ Study by XPS and TEM

3. International Roadmap for Devices and Systems lithography roadmap

4. High NA EUV lithography: Next step in EUV imaging

5. High-numerical aperture extreme ultraviolet scanner for 8-nm lithography and beyond

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