Calibration of the amplification coefficient in interference microscopy by means of a wavelength standard

Author:

de Groot Peter,Beverage Jake

Publisher

SPIE

Reference31 articles.

1. ISO, [WD 25178-600:2014(E): Geometrical product specifications (GPS) — Surface texture: Areal — Part 600: Metrological characteristics for areal-topography measuring methods (DRAFT)] International Organization for Standardization, Geneva (2014).

2. ISO, [25178-604:2013(E): Geometrical product specification (GPS) – Surface texture: Areal – Nominal characteristics of non-contact (coherence scanning interferometric microscopy) instruments] International Organization for Standardization, Geneva (2013).

3. Advice from the CCL on the use of unstabilized lasers as standards of wavelength: the helium–neon laser at 633 nm

4. ISO, [FDIS 25178-70:2013(E): Geometrical product specification (GPS) Surface texture: Areal Part 70: Material measures] International Organization for Standardization (2013).

5. A single set of material measures for the calibration of areal surface topography measuring instruments: the NPL Areal Bento Box;Leach,2013

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