Liquid-xenon-jet laser-plasma source for EUV lithography
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SPIE
Cited by 16 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Failed promises: economic integration, bureaucratic encounters, and the EU-Turkey Customs Union;Dialectical Anthropology;2012-11-29
2. High brightness electrodeless Z-Pinch EUV source for mask inspection tools;SPIE Proceedings;2012-03-29
3. Next-generation lithography for 22 and 16 nm technology nodes and beyond;Science China Information Sciences;2011-05
4. In Defence of Community? Long-Distance Localism and Transnational Political Engagement Between the US and the Peruvian Andes;Journal of Ethnic and Migration Studies;2008-08-06
5. Extreme ultraviolet lithography: A review;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2007
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