Development of microbolometer with high fill factor and high mechanical stability by shared-anchor structure-Reference-Cited by-同舟云学术

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Development of microbolometer with high fill factor and high mechanical stability by shared-anchor structure

Published:2012-05-01 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
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Author:

Kim Taehyun,Kyung Kimyung,Park Jae Hong,Kim Young Su,Lim Sung Kyu,Kim Kyungmin,Lee Kwyro,Welham C.,Kim Hee Yeoun

Publisher

SPIE

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Improved Responsivity of an a-Si-based Micro-bolometer Focal Plane Array with a SiNx Membrane Layer;JOURNAL OF SENSOR SCIENCE AND TECHNOLOGY;2022-11-30

2. Thermal detectors of uncooled multi-element infrared imaging arrays. I. Thermally insulated elements;Optoelectronics, Instrumentation and Data Processing;2015-11

3. Thermal Characterization of Individual Pixels in Microbolometer Image Sensors by Thermoreflectance Microscopy;JSTS:Journal of Semiconductor Technology and Science;2015-10-30

4. High-uniformity post-CMOS uncooled microbolometer focal plane array integrated with active matrix circuit;Sensors and Actuators A: Physical;2014-05

5. Wafer-level reliability characterization for wafer-level-packaged microbolometer with ultrasmall array size;Microsystem Technologies;2014-02-05

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