Methodology for evaluating the information distribution in small angle scattering from periodic nanostructures-Reference-Cited by-同舟云学术

Methodology for evaluating the information distribution in small angle scattering from periodic nanostructures

Published:2018-11-03 Issue:04 Volume:17 Page:1
ISSN:1932-5150
Container-title:Journal of Micro/Nanolithography, MEMS, and MOEMS
language:
Short-container-title:J. Micro/Nanolith. MEMS MOEMS

Author:

Sunday Daniel F.¹,Kline R. Joseph¹

Affiliation:

1. National Institute of Standards and Technology, Gaithersburg, Maryland

Publisher

SPIE-Intl Soc Optical Eng

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference34 articles.

1. Strategies for CT Radiation Dose Optimization

2. Low-Dose X-ray CT Reconstruction via Dictionary Learning

3. Radiation damage in protein crystals is reduced with a micron-sized X-ray beam

4. Gaps analysis for CD metrology beyond the 22nm node

5. X-ray scattering critical dimensional metrology using a compact x-ray source for next generation semiconductor devices

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. X-ray-based overlay metrology using reciprocal space slicing analysis;Optics Letters;2023-12-05

2. Inline metrology of high aspect ratio hole tilt and center line shift using small-angle x-ray scattering;Journal of Micro/Nanopatterning, Materials, and Metrology;2023-03-22

3. Simulations of the transmission small angle x-ray scattering for three-dimensional architectures;Tenth International Symposium on Precision Mechanical Measurements;2021-11-19

4. Metrology for advanced transistor and memristor devices and materials;Metrology, Inspection, and Process Control for Microlithography XXXIV;2020-03-20