Accurate and fast computation of transmission cross coefficients-Reference-Cited by-同舟云学术

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Accurate and fast computation of transmission cross coefficients

Published:2015-03-18 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
language:
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Author:

Apostol Ştefan,Hurley Paul,Ionescu Radu-Cristian

Publisher

SPIE

Reference14 articles.

1. Sum of coherent systems decomposition by SVD;Cobb,1995

2. Area of common overlap of three circles;Fewell,2006

3. Two-dimensional optical imaging for photolithography simulation;Flanner,1986

4. Exact computation of scalar 2D aerial imagery. In Design, Process Integration, and Characterization for Microelectronics;Gordon,2002

5. Method for computing partially coherent aerial imagery;Gordon,2003

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Computation of transmission cross coefficients for pixelated illumination source;DTCO and Computational Patterning;2022-05-26

2. Forbidden pitches: causes, source optimization, and their role in design rules;SPIE Proceedings;2015-03-18

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