Research on the control technology of machining marks in double-side polishing of large aperture optical element-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Research on the control technology of machining marks in double-side polishing of large aperture optical element

Published:2019-01-16 Issue: Volume: Page:
ISSN:
Container-title:9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
language:
Short-container-title:

Author:

Huang Ying,Zhao Fang,He Manze,He Xiang

Publisher

SPIE

Reference6 articles.

1. A kinematic analysis of disk motion in a double sided polisher for chemical mechanical planarization (CMP)

2. Technique of double-sided polishing based on ring-pendulum polishing;He;Infrared and Laser Engineering,2011

3. Effect of Pressure on Surface Morphology of 300 mm Silicon Wafers during Double-Side Polishing;Ku;Chinese Journal of Rare Metals,2006

4. Numerical simulation of pressure distribution of flow field in the technology of double-sided polishing;Wei;Chinese Journal of Applied Mechanics,2010

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Effects of disk size and position on material removal characteristic on double-sided polishing;Speckle 2023: VIII International Conference on Speckle Metrology;2024-03-04

2. Polishing uniformity analysis and process optimization based on the kinematic model of ring pendulum double-sided polisher;The International Journal of Advanced Manufacturing Technology;2023-05-05

3. High-Precision Machining Method of Weak-Stiffness Mirror Based on Fast Tool Servo Error Compensation Strategy;Micromachines;2021-05-24

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP