Resonating AlN-thin film MEMS mirror with digital control
Author:
Affiliation:
1. VTT Research Centre of Finland Ltd., Espoo
Publisher
SPIE-Intl Soc Optical Eng
Subject
General Engineering
Cited by 15 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. AlScN-based quasi-static multi-degree-of-freedom piezoelectric MEMS micromirror with large mirror plate and high fill factor;Sensors and Actuators A: Physical;2024-12
2. Crack Nucleation and Propagation Mechanisms of Sputtered AlSi Alloy Thin Film under Quasistatic and Dynamic Tension;Sensors and Materials;2024-08-16
3. Fatigue fracture mechanism of sputtered AlSi alloy film by pulsating-tension cyclic loading testing;Thin Solid Films;2024-04
4. Low temperature sputtering deposition of Al1−xScxN thin films: Physical, chemical, and piezoelectric properties evolution by tuning the nitrogen flux in (Ar + N2) reactive atmosphere;Journal of Applied Physics;2024-03-26
5. Near-zero stiffness accelerometer with buckling of tunable electrothermal microbeams;Microsystems & Nanoengineering;2024-03-22
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