Funder
University of Hyogo
Huaihai Institute of Technology
Reference33 articles.
1. Investigation of mechanical properties of duralumin sandwich hybrid composite using e-glass fiber;Chintalapudi;Int. J. Mech. Eng. Technol.,2017
2. Thin-film aluminum RF MEMS switched capacitors with stress tolerance and temperature stability;Reines;J. Microelectromech. Syst.,2010
3. MEMS cantilever-controlled plasmonic colors for sustainable optical displays;Han;Sci. Adv.,2022
4. Resonating AlN-thin film MEMS mirror with digital control;Ruotsalainen;J. Opt. Microsyst.,2022
5. J. Zhang, J. Reif, C. Strobel, P. Chava, A. Erbe, A. Voigt, T. Mikolajick, R. Kirchner, Dry release of MEMS origami using thin Al2O3 films for facet-based device integration, Micro and Nano Eng. 19 (2923) 100179. https://doi.org/10.1016/j.mne.2023.100179.
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