Author:
Kuenzig Thomas,Schrag Gabriele,Dehé Alfons,Wachutka Gerhard
Reference3 articles.
1. Design of a Poly Silicon MEMS Microphone for High Signal-to-Noise Ratio;Dehé,2013
2. Modellierung des dynamischen Verformungsverhaltens eines kapazitiven Inertialsensors;Niessner,2005
3. System-level Modeling of Silicon Microphones Including Distributed Effects