System-level Modeling of Silicon Microphones Including Distributed Effects-Reference-Cited by-同舟云学术

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System-level Modeling of Silicon Microphones Including Distributed Effects

Published:2014 Issue: Volume:87 Page:636-639
ISSN:1877-7058
Container-title:Procedia Engineering
language:en
Short-container-title:Procedia Engineering

Author:

Kuenzig T.,Schrag G.,Nawaz M.,Herrmann M.,Dehe A.,Wachutka G.

Publisher

Elsevier BV

Subject

Applied Mathematics

Reference4 articles.

1. Design of a Poly Silicon MEMS Microphone for High Signal-to-Noise Ratio;Dehé,2013

2. System-Level Modeling of MEMS Using Generalized Kirchhoffian Networks - Basic Principles;Schrag,2013

3. Mixed-Level Approach for the Modeling of Distributed Effects in Microsystems;Niessner,2013

4. Modellierung des dynamischen Verformungsverhaltens eines kapazitiven Inertialsensors. Technical Report 2005/06;Niessner,2005

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Virtual design and optimization studies for industrial silicon microphones applying tailored system-level modeling;Journal of Micromechanics and Microengineering;2018-03-14

2. Uncooled microbolometer system-level co-simulation using finite element analysis method and intellectual property core;Microsystem Technologies;2016-03-23

3. Acoustic high-frequency effects inside the package of capacitive silicon microphones and their impact on the device performance;SPIE Proceedings;2015-05-21

4. Modeling distributed electrostatic effects in silicon microphones and their impact on the performance;SPIE Proceedings;2015-05-21

5. System-level simulation of microbolometer and read-out integrated circuit;Science China Technological Sciences;2015-04-11

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