Error correction method in radial runout measurements based on laser autocollimation

Author:

Fujimaki Kengo,Mitsui Kimiyuki

Publisher

SPIE-Intl Soc Optical Eng

Subject

General Engineering,Atomic and Molecular Physics, and Optics

Reference9 articles.

1. A micro-angle sensor based on laser autocollimation

2. K. Takamasu, A. Kobaru, R. Furutani, and S. Ozono , “Three dimensional position sensor using optical collimator for nanometer resolution,” inInt. Progress in Precision Engineering: Proc. 7th Int. Precision Engineering Seminar, N. Ikawa, Ed., pp. 62–65, Butterworth-Heinemann (1993).

3. K. Mitsui, J. Ling, Y. Hashimoto, K. Nunome, and K. Hibi , “Development of an optical measuring method for radial spindle error,” inInt. Progress in Precision Engineering: Proc. 7th Int. Precision Engineering Seminar, N. Ikawa , Ed., pp. 506–517, Butterworth-Heinemann (1993).

4. K. Fujimaki and K. Mitsui , “Development of an optical measuring device for rotation accuracy of micro-spindle—application to measurements of a high-speed spindle—,” inTowards Synthesis of Micro-/Nano-Systems: The 11th Int. Conf. on Precision Engineering, pp. 83–89, Springer (2006).

Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Reflector automatic acquisition and pointing based on auto-collimation theodolite;Review of Scientific Instruments;2018-01

2. Effect analysis of nonuniformity on four-quadrant detector and compensation correction;International Symposium on Photoelectronic Detection and Imaging 2013: Laser Sensing and Imaging and Applications;2013-09-19

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