Three Dimensional Position Sensor Using Optical Collimator for Nanometer Resolution-Reference-Cited by-同舟云学术

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Three Dimensional Position Sensor Using Optical Collimator for Nanometer Resolution

Published:1993 Issue: Volume: Page:62-65
ISSN:
Container-title:International Progress in Precision Engineering
language:
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Author:

Takamasu Kiyoshi,Kobaru Atushi,Furutani Ryousyu,Ozono Sigeo

Publisher

Elsevier

Reference2 articles.

1. Takamasu, K., Kobaru, A., Furutani, R. and Ozono, S., Three dimensional position measurement using critical angle prism. Proc. 4th ISMQC, 1992, 202.

2. Takamasu, K. and Kasahara, T., Three dimensional position measurement of spherical target using optical collimator. Proc. 3rd ISMQC, 1989, 87.

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Error correction method in radial runout measurements based on laser autocollimation;Optical Engineering;2008

2. Three Dimensional Displacement Measurement Using Ring Beam (2nd Report);Journal of the Japan Society for Precision Engineering, Contributed Papers;2006

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