A study on phase transformation of monocrystalline silicon due to ultra-precision polishing by molecular dynamics simulation
Author:
Funder
National Natural Science Foundation of China
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4763462
Reference18 articles.
1. Controlled mechanical AFM machining of two-dimensional electron systems: fabrication of a single-electron transistor
2. Lapping of Single Crystal Diamond Tools
3. Investigation of material removal mechanism of silicon wafer in the chemical mechanical polishing process using molecular dynamics simulation method
4. A molecular dynamics study of phase transformations in mono-crystalline Si under nanoindentation
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