Plasma hollow cathodes
Author:
Affiliation:
1. Jet Propulsion Laboratory, California Institute of Technology, 4800 Oak Grove Drive, Pasadena, California 91109, USA
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
https://aip.scitation.org/doi/pdf/10.1063/5.0051228
Reference156 articles.
1. Plasma activated physical vapour deposition (PAPVD) by hollow cathode arc (HCA)
2. Hot hollow cathode and its applications in vacuum coating: A concise review
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4. Hollow cathode plasma sources for large area surface treatment
5. The hollow cathode: a high-performance tool for plasma-activated deposition
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