Author:
Bowers J. E.,Hemenway B. R.,Wilt D. P.
Subject
Physics and Astronomy (miscellaneous)
Cited by
17 articles.
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1. Etching of Semiconductors;Laser Processing and Chemistry;2011
2. Photodissolution of n-GaAs electrodes under laser illumination: control of the etching profile;Semiconductor Science and Technology;2001-03-14
3. Laser direct dry etching of GaAs/AIGaAs multilayer;Laser Applications in Microelectronic and Optoelectronic Manufacturing IV;1999-07-15
4. Photoelectrochemical Etching of InAs;Journal of The Electrochemical Society;1994-05-01
5. Photoelectrochemical Etching of GaAs / AlGaAS Multilayer Structures;Journal of The Electrochemical Society;1993-09-01