A non-stationary model for high power impulse magnetron sputtering discharges
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3656446
Reference69 articles.
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4. Pulsed dc magnetron discharge for high-rate sputtering of thin films
5. Plasma parameters of very high target power density magnetron sputtering
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