Enhancement of sp[sup 3] hybridized C in amorphous carbon films by Ar ion bombardment and Si incorporation
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Reference27 articles.
1. Hard amorphous (diamond-like) carbons
2. Deposition of diamond-like carbon
3. Properties of filtered-ion-beam-deposited diamondlike carbon as a function of ion energy
4. Properties of carbon ion deposited tetrahedral amorphous carbon films as a function of ion energy
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