Author:
Reiche Manfred,Kittler Martin,Erfurth Wilfried,Pippel Eckhard,Sklarek Kornelia,Blumtritt Horst,Haehnel Angelika,Uebensee Hartmut
Subject
General Physics and Astronomy
Reference31 articles.
1. Silicon Device Scaling to the Sub-10-nm Regime
2. Materials and device structures for sub-32 nm CMOS nodes
3. R. Labusch and W. Schröter, inDislocations in Solids, edited by F. R. N. Nabarro (North-Holland, Amsterdam, 1980), Vol. 5, p. 127.
Cited by
24 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献