Performance investigation of a focused ion beam for sputter deposition-Reference-Cited by-同舟云学术

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Performance investigation of a focused ion beam for sputter deposition

Published:1992-04 Issue:4 Volume:63 Page:2400-2402
ISSN:0034-6748
Container-title:Review of Scientific Instruments
language:en
Short-container-title:Review of Scientific Instruments

Author:

Yuan‐Zhu Kuang,Jun Yan

Publisher

AIP Publishing

Subject

Instrumentation

Link

http://aip.scitation.org/doi/pdf/10.1063/1.1142942

Reference2 articles.

1. Ion beam divergence characteristics of two-grid accelerator systems

2. Focused ion beam designs for sputter deposition

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Effects of Ga-Irradiation On Properties of Materials Processed by A Focused Ion Beam (FIB);MRS Proceedings;2000

2. Surface modification of M50 steel by dual-ion-beam dynamic mixing;Surface and Coatings Technology;1994-08

3. The progress of ion sources in China (invited);Review of Scientific Instruments;1994-04

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