A planar-type surface-wave plasma source with a subwavelength diffraction grating inclusion for large-area plasma applications
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3168493
Reference20 articles.
1. High-density flat plasma production based on surface waves
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5. T-junction tuning system for large-area surface-wave plasma sources
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