Tetrahedral amorphous-carbon thin films for silicon-on-insulator application
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1445472
Reference13 articles.
1. Silicon-on-lnsulator Technology: Past Achievements and Future Prospects
2. Radiation response of silicon on diamond (SOD) devices
3. Diamondlike Thin Films and Their Properties
4. Diamond-like carbon — present status
5. Applications of Aluminium Nitride Films Deposited by Reactive Sputtering to Silicon-On-Insulator Materials
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