Comparison between electron‐beam and furnace rapid isothermal anneals of phosphorus‐implanted solar cells
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.332546
Reference13 articles.
1. Tailored emitter, low-resistivity, ion-implanted silicon solar cells
2. Self‐annealed ion implanted solar cells
3. Annealing of phosphorus implanted silicon wafers by multiscanning electron beam: Solar cells application
4. Substrate heating and emitter dopant effects in laser‐annealed solar cells
Cited by 3 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Improving positive ion detection by reduction of the work function of post-acceleration dynodes;International Journal of Mass Spectrometry and Ion Processes;1993-07
2. Solar Cells Made by Rapid Thermal Annealing of As+-Implanted Monocrystalline Silicon. Relationship Between Annealing Parameters and Junction Characteristics;Seventh E.C. Photovoltaic Solar Energy Conference;1987
3. Effect of diffuse scattering in the strain profile determination by double crystal X-ray diffraction;physica status solidi (a);1985-01-16
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