Isotope effects between hydrogen and deuterium microwave plasmas on chemical vapor deposition homoepitaxial diamond growth
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2727380
Reference34 articles.
1. High quality homoepitaxial CVD diamond for electronic devices
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3. n-type doping of (001)-oriented single-crystalline diamond by phosphorus
4. Lightly phosphorus-doped homoepitaxial diamond films grown by chemical vapor deposition
5. High Carrier Mobility in Single-Crystal Plasma-Deposited Diamond
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