Interrelationship of in situ growth stress evolution and phase transformations in Ti/W multilayered thin films
Author:
Affiliation:
1. Department of Metallurgical Engineering, The University of Alabama, Tuscaloosa, Alabama 35487-0202, USA
Funder
National Science Foundation (NSF)
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://scitation.aip.org/deliver/fulltext/aip/journal/jap/119/24/1.4954687.pdf?itemId=/content/aip/journal/jap/119/24/10.1063/1.4954687&mimeType=pdf&containerItemId=content/aip/journal/jap
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1. Texture and phase transformation of sputter-deposited metastable Ta films and multilayers
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5. The intrinsic stress of polycrystalline and epitaxial thin metal films
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