Study on the ions’ behavior in an electron cyclotron resonance plasma
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.365382
Reference14 articles.
1. Electron cyclotron resonance microwave discharges for etching and thin‐film deposition
2. Ion transport in an electron cyclotron resonance plasma
3. Spatially resolved ion velocity distributions in a diverging field electron cyclotron resonance plasma reactor
4. Ion and neutral energies in a multipolar electron cyclotron resonance plasma source
5. Ion energetics in electron cyclotron resonance discharges
Cited by 11 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Particle-in-cell/Monte Carlo collision simulation of the ionization process of surface-wave plasma discharges resonantly excited by surface plasmon polaritons;Physics of Plasmas;2013-03
2. Production of planar-type overdense plasma with resonant excitation of surface plasmon polaritons;Journal of Applied Physics;2009-09-15
3. Two-dimensional simulation of an electron cyclotron resonance plasma source with power deposition and neutral gas depletion;Plasma Sources Science and Technology;2002-05-27
4. Two-dimensional simulation of an electron cyclotron resonance plasma source with self-consistent power deposition;Surface and Coatings Technology;2000-09
5. Ion distribution functions in an Ar-Cl ECR discharge;Plasma Sources Science and Technology;2000-07-19
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3