Ion energetics in electron cyclotron resonance discharges-Reference-Cited by-同舟云学术

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Ion energetics in electron cyclotron resonance discharges

Published:1990-09 Issue:5 Volume:8 Page:3720-3725
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Holber W. M.,Forster J.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.576485

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