Dielectric properties of ‘‘diamondlike’’ carbon prepared by rf plasma deposition
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.334866
Reference15 articles.
1. Optical properties of "diamondlike" carbon films: An ellipsometric study
2. Use of Raman scattering to investigate disorder and crystallite formation in as-deposited and annealed carbon films
3. Summary Abstract: Optical, Raman, and photoemission results on amorphous ‘‘diamondlike’’ carbon films
4. Interfacial electrical properties of ion-beam sputter deposited amorphous carbon on silicon
5. High frequency capacitance-voltage and conductance-voltage characteristics of d.c. sputter deposited a-carbon/silicon MIS structures
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