Effect of negative self-bias voltage on microstructure and properties of DLC films deposited by RF glow discharge
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference12 articles.
1. Dielectric properties of ‘‘diamondlike’’ carbon prepared by rf plasma deposition
2. Study of the mechanical properties of tetrahedral amorphous carbon films by nanoindentation and nanowear measurements
3. Electrical and optical properties of diamond-like carbon
4. Electron field emission and structural properties of carbon chemically vapor-deposited films
5. Field emission properties of silicon carbide and diamond-like carbon (DLC) films made by chemical vapour deposition techniques
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