Laser ablation deposition of metal oxides/nitrides films at room temperature
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.371226
Reference10 articles.
1. Effect of nitrogen gas on preparation of Ti–Al–N thin films by pulsed laser ablation
2. Near band-edge transition in aluminum nitride thin films grown by metal organic chemical vapor deposition
3. Morphology and X-Ray Diffraction Peak Widths of Aluminum Nitride Single Crystals Prepared by the Sublimation Method
4. Preparation of nearly oxygen-free AlN thin films by pulsed laser deposition
5. Diagnostics of laser ablated plasmas using fast photography
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1. Investigation of AlN plasma induced by a laser into a vacuum and nitrogen ambience;Journal of Analytical Atomic Spectrometry;2023
2. Unexpected temporal evolution of atomic spectral lines of aluminum in a laser induced breakdown spectroscopy experiment;Spectrochimica Acta Part B: Atomic Spectroscopy;2014-11
3. Dynamics of laser-blow-off induced Li plume in confined geometry;Physics of Plasmas;2013-08
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5. Phase transformation in room temperature pulsed laser deposited TiO2 thin films;Applied Surface Science;2003-02
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