Mechanisms of buried oxide formation by ion implantation
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.98264
Reference16 articles.
1. Silicon on Insulator Formed By O+ OR N+ Ion Implantation
2. Silicon on Insulator Formed By O+ OR N+ Ion Implantation
3. Laser-Induced Solid Phase Crystallization in Amorphous Silicon Films
4. Kinetics and Mechanisms of Solid Phase Epitaxy and Competitive Processes in Silicon
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