1. INESC - Microsistemas e Nanotecnologias, 1000-029 Lisboa, Portugal
2. Instituto Superior Tecnico (IST), Universidade de Lisboa, 1049-001 Lisboa, Portugal
3. Fraunhofer Institute for Photonic Microsystems IPMS, 01099 Dresden, Germany
4. Singulus Technologies AG, 63796 Kahl am Main, Germany