Realizing intrinsic piezoresponse in epitaxial submicron lead zirconate titanate capacitors on Si-Reference-Cited by-同舟云学术

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Realizing intrinsic piezoresponse in epitaxial submicron lead zirconate titanate capacitors on Si

Published:2002-11-25 Issue:22 Volume:81 Page:4215-4217
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Nagarajan V.,Stanishevsky A.,Chen L.,Zhao T.,Liu B.-T.,Melngailis J.,Roytburd A. L.,Ramesh R.,Finder J.,Yu Z.,Droopad R.,Eisenbeiser K.

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/pdf/10.1063/1.1516857

Reference14 articles.

1. Ferroelectric thin films for micro-sensors and actuators: a review

2. Measurement of piezoelectric coefficients of ferroelectric thin films

3. Measurement and calculation of PZT thin film longitudinal piezoelectric coefficients

4. Measurement of Electric-Field-Induced Displacements in (Pb, La)TiO3Thin Films Using Scanning Probe Microscopy

5. Longitudinal piezoelectric coefficient measurement for bulk ceramics and thin films using pneumatic pressure rig

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