Effect of driving frequency on the electron energy distribution function and electron-sheath interaction in a low pressure capacitively coupled plasma-Reference-Cited by-同舟云学术

Effect of driving frequency on the electron energy distribution function and electron-sheath interaction in a low pressure capacitively coupled plasma

Published:2016-11 Issue:11 Volume:23 Page:110701
ISSN:1070-664X
Container-title:Physics of Plasmas
language:en
Short-container-title:Physics of Plasmas

Author:

Sharma S.¹,Sirse N.²,Kaw P. K.¹,Turner M. M.²^ORCID,Ellingboe A. R.²

Affiliation:

1. Institute for Plasma Research (IPR), Gandhinagar 382428, India

2. School of Physical Sciences and NCPST, Dublin City University, Dublin 9, Ireland

Funder

European Regional Development Fund (ERDF) under the National Strategic Reference Framework (NSRF)

Department of Science and Technology, Ministry of Science and Technology (DST)

Enterprise Ireland

Korea Institute for Advancement of Technology (KIAT)

Korea Institute of Energy Technology Evaluation and Planning (KETEP)

Publisher

AIP Publishing

Subject

Condensed Matter Physics

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4967356

Reference18 articles.

1. Frequency effects in silane plasmas for plasma enhanced chemical vapor deposition

2. Capacitively coupled glow discharges at frequencies above 13.56 MHz

3. Influence of Excitation Frequency on the Electron Distribution Function in Capacitively Coupled Discharges in Argon and Helium

4. Electron heating mode transition observed in a very high frequency capacitive discharge

5. Electron energy distribution functions measured by Langmuir probe with optical emission spectroscopy in very high frequency capacitive discharge in nitrogen

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