Low-temperature homoepitaxial growth of β-Ga2O3 thin films by atmospheric pressure plasma-enhanced chemical vapor deposition technique

Abstract

Low-temperature homoepitaxial growth of β-Ga2O3(-201) has been successfully demonstrated by the atmospheric pressure plasma-enhanced chemical vapor deposition technique. To search for low-temperature growth, temperature-dependent studies were carried out between 350 and 600 °C. A high N2 gas flow rate, low gallium source concentration, and high oxygen flow rate ratio played key roles in growing independent and homogeneous multiple nuclei of Ga2O3, leading to three-dimensional grain growth mode, single crystallinity, and the highest growth rate of ⁓0.17 µm/h at 350 °C. The highly reactive atmospheric pressure oxygen plasma actively led to epitaxial growth. The low thermal budget homoepitaxial growth is a record reduction reported thus far.