Nanocrystalline-to-amorphous transition in nanolaminates grown by low temperature atomic layer deposition and related mechanical properties
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4711767
Reference36 articles.
1. Atomic Layer Deposition: An Overview
2. Synthesis and Surface Engineering of Complex Nanostructures by Atomic Layer Deposition
3. Atomic layer deposition of quantum-confined ZnO nanostructures
4. Atomic Layer Deposition of Nanostructured Materials for Energy and Environmental Applications
5. Applications of atomic layer deposition to nanofabrication and emerging nanodevices
Cited by 58 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Layer‐Engineered Functional Multilayer Thin‐Film Structures and Interfaces through Atomic and Molecular Layer Deposition;Advanced Materials Interfaces;2024-06-28
2. Subfreezing conversion of ALD-derived ZnO layer to ultra-thin ZIF-8 membrane for high-flux C3H6 production;Chemical Engineering Science;2023-12
3. Thermomechanical properties of aluminum oxide thin films made by atomic layer deposition;Journal of Vacuum Science & Technology A;2022-12
4. Al2O3-ZnO atomic layer deposited nanolaminates for improving mechanical and corrosion properties of sputtered CrN coatings;Thin Solid Films;2022-10
5. Toward controlling the Al2O3/ZnO interface properties by in situ ALD preparation;Dalton Transactions;2022
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3