Rapid thermal annealing and regrowth of thermal donors in silicon
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.336820
Reference9 articles.
1. Short Time Annealing
2. Oxygen Content of Silicon Single Crystals
3. Resistivity of Bulk Silicon and of Diffused Layers in Silicon
4. Investigation of short time donor annihilation in silicon
5. Oxygen diffusion and thermal donor formation in silicon
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