Investigation of local electrical properties of coincidence-site-lattice boundaries in location-controlled silicon islands using scanning capacitance microscopy
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2968663
Reference23 articles.
1. Improving the Uniformity of Poly-Si Films Using a New Excimer Laser Annealing Method for Giant-Microelectronics
2. Ultra-large grain growth of Si films on glassy substrate
3. Low temperature poly-Si thin-film transistor fabrication by metal-induced lateral crystallization
4. Location and Orientation Control of Si Grain by Combining Metal-Induced Lateral Crystallization and Excimer Laser Annealing
5. On the super lateral growth phenomenon observed in excimer laser‐induced crystallization of thin Si films
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