Raman study of amorphous to microcrystalline phase transition in cw laser annealeda‐Si:H films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.343723
Reference14 articles.
1. Solid-phase crystallization kinetics in dopeda-Si chemical-vapor-deposition films
2. cw laser annealing of hydrogenated amorphous silicon obtained by rf sputtering
3. Raman scattering from ion-implanted silicon
4. Raman study of phase transitions in ion-implanted andQ-switched neodymium-doped yttrium aluminum garnet laser annealed silicon
5. Raman study of laser annealed silicon
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