Estimating electron temperature and density using improved collisional-radiative model in high-density RF argon plasma-Reference-Cited by-同舟云学术

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Estimating electron temperature and density using improved collisional-radiative model in high-density RF argon plasma

Published:2021-07-01 Issue:7 Volume:11 Page:075226
ISSN:2158-3226
Container-title:AIP Advances
language:en
Short-container-title:AIP Advances

Author:

Horita H.¹^ORCID,Kuwahara D.²^ORCID,Akatsuka H.³^ORCID,Shinohara S.¹^ORCID

Affiliation:

1. Tokyo University of Agriculture and Technology, 2-24-16 Naka-cho, Koganei, Tokyo 184-8588, Japan

2. College of Engineering, Chubu University, 1200 Matsumoto-cho, Kasugai, Aichi 487-8501, Japan

3. Institute of Innovative Research, Tokyo Institute of Technology, 2-12-1-N1-10, Ookayama, Meguro, Tokyo 152-8550, Japan

Funder

The Japan Society for the Promotion of Science

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

https://aip.scitation.org/doi/pdf/10.1063/5.0050215

Reference30 articles.

1. Development of Electrodeless Plasma Thrusters With High-Density Helicon Plasma Sources

2. Plasmas for spacecraft propulsion

3. A review of rotating magnetic field current drive and the operation of the rotamak as a field-reversed configuration (Rotamak-FRC) and a spherical tokamak (Rotamak-ST)

4. Principal physics of rotating magnetic-field current drive of field reversed configurations

5. Study on electromagnetic plasma propulsion using rotating magnetic field acceleration scheme

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1. Helium line emission spectroscopy to measure plasma parameters using modeling and machine learning in low-temperature plasmas;Journal of Physics D: Applied Physics;2024-07-26

2. Machine learning-based prediction of the electron energy distribution function and electron density of argon plasma from the optical emission spectra;Journal of Vacuum Science & Technology A;2024-07-11

3. Self-consistent calculation of the optical emission spectrum of an argon capacitively coupled plasma based on the coupling of particle simulation with a collisional-radiative model;Journal of Physics D: Applied Physics;2024-06-25

4. Quantitative analysis of optical emission spectroscopy for plasma process monitoring;Japanese Journal of Applied Physics;2024-05-01

5. First-principles simulation of optical emission spectra for low-pressure argon plasmas and its experimental validation;Plasma Sources Science and Technology;2023-12-01

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