Studies on glow‐discharge characteristics during dc reactive magnetron sputtering
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.348881
Reference14 articles.
1. The mechanism of reactive sputtering
2. D.C. cathode sputtering: influence of the oxygen content in the gas flow on the discharge current
3. Analysis of sputtering discharge by optical and mass spectrometry. II. Platinum and tantalum sputtered in argon/nitrogen mixtures
4. A glow discharge mass spectrometry study of reactive sputtering
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