1. Magnetron sputtering[J];S Rossnagel;Journal of Vacuum Science & Technology A: Vacuum, Surf aces, and Films,2020
2. Influence of direct current plasma magnetron sputtering param eters on the material characteristics of polycrystalline copper films;K Y Chan;Applied surface science,2009
3. Physics and technology of magnetron sputtering discharges;J Gudmundsson;Plasma Sources Scie nce and Technology,2020
4. High-precision modeling of dynamic etching in high-power magnetron sputtering[J];S Cui;Journal of Physics D: Applied Physics,2022
5. Manipulating the optoelectronic characteristic of AZO films by magn etron sputtering power;Y Zhao;Vacuum,2023