Subject
General Physics and Astronomy
Cited by
78 articles.
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1. Isotopic enrichment of silicon by high fluence
28Si−
ion implantation;Physical Review Materials;2021-01-08
2. The sputtering yield of crystalline Si(1 0 0) surface by monoatomic and diatomic nitrogen ions impact;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2019-12
3. Note on the artefacts in SRIM simulation of sputtering;Applied Surface Science;2018-05
4. Magnetron Sputtering Technique;Handbook of Manufacturing Engineering and Technology;2014-09-30
5. Magnetron Sputtering Technique;Handbook of Manufacturing Engineering and Technology;2013